Author: Verlaan, V.
Title: Silicon nitride at high growth rate using hot wire chemical vapor deposition . Proefschrift. Universieit Utrecht.
Description: 2008. 8°. 121pp. Pap. 9789039348826 Diss./Thesis. Blibliogr.

Keywords: Science, Wissenschaft, Wetenschap,Techniek, Technics, Technik ISBN: 9789039348826