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Borst, Christopher Lyle, William N. Gill and Ronald J. Gutmann: - Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses. Fundamental Mechanisms and Application to IC Interconnect Technology.

Springer, 2002. 243 S.; Ill. Hardcover Very good. Shrink wrapped. Free shipping within Germany. Shipping costs to EU-countries: 9.50 EUR, to non-EU-countries: 15.00 EUR.
EUR 30.70 [Appr.: US$ 33.01 | £UK 26 | JP¥ 5184] Book number 813007

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