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Mertens, Paul, Marc Meuris and Marc Heyns (Edts.): - Ultra Clean Processing of Semicounductor Surfaces IX. (=Solid State Phenomena; Vols. 145-146).

Trans Tech, 2009. 1st ed. 412 S.; Ill. Paperback Like new. Shrink wrapped. Free shipping within Germany. Shipping costs to EU-countries: 9.50 EUR, to non-EU-countries: 15.00 EUR.
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